| Products Introduction |
|
| 产品介绍 |
| |
|
SERIES PT1400 |
| |
TIED DIAPHRAGM REGULATOR
intermediate to high flow applications |
|
 |
• Single stage
• Stainless steel 316L VAR secondary remelt construction
• Absolute sub-atmospheric option, flow rate to 6 slpm
• Cylinder or point of use specialty and bulk gases
• Flow rates to 600 slpm (21 scfm)
• Vacuum to 2,300 psig (159 bar) inlet HR option to 3,000 psig (207 bar)
• Designed and manufactured exclusively for UHP semiconductor applications
• Knob LOTO option
• Installa on and opera ng instructions available at www.aptech-online.com |
| Operating Parameters |
Other Parameters |
| Source pressure |
PT1400 |
| |
PT1400 A |
| |
PT1400 HR |
|
| vacuum to 2,300 psig (159 bar) |
| vacuum to 300 psig (21 bar) |
| vacuum to 3,000 psig (207 bar) |
|
| Delivery pressure |
PT1402 A |
| |
PT1402 |
| |
PT1406 |
| |
PT1410 |
| |
PT1415* |
|
100 mm Hg absolute to 30 psig (2 bar)
(not available for HR) |
1 to 30 psig (0.07 to 2 bar)
(not available for HR) |
1 to 60 psig (0.07 to 4 bar)
(not available for HR) |
| 2 to 100 psig (0.14 to 7 bar) |
| 5 to 150 psig (.34 to 10 bar) |
|
| Proof pressure |
150% of operating pressures |
| Burst pressure |
300% of operating pressures |
| Finish |
electropolished and passivated |
| Seat |
PCTFE (Polyimide optional) |
*PT1415 will not achieve full outlet pressure rating at all inlet pressures. |
| Inlet/o utlet connectors |
1/4, 3/8 or 1/2 inch face seal or tube weld |
| Bonnet port |
1/8 inch NPT |
| Flow coefficient (Cv) |
0.45 |
| Internal volume |
1.06 in3 (17.4 cm3) |
| Operating temperature |
-40° to +160°F(-40° to +71°C)** |
| Surface finish |
15 μin Ra max / 10 μin. Ra avg.
(0.4/0.25 μm) standard;10 μin (0.25 μm);
7 μin (0.18 μm); and 5 μin (0.13 μm) Ra max optional
|
| Inboard leakage |
2 x 10-10 sccs |
| Outboard leakage |
2 x 10-9 sccs He |
| Leakage across seat |
4 x 10-8 sccs He |
| Installation |
surface or panel (optional) |
| Supply pressure effect |
1.6 psig per 100 psig source pressure change |
**VS option 14d° to 194°F (-10° to + 90°C). |
| Type of Service |
Series PT1400 S
Corrosive |
Series PT1400 SH
Corrosive |
| Wetted Parts |
| Body |
SS 316L secondary remelt |
SS 316L secondary remelt |
| Poppet and diaphragm |
Ni-Cr-Mo alloy / UNS N06022 |
Ni-Cr-Mo alloy / UNS N06022 |
| Nozzle |
SS 316L |
Ni-Cr-Mo alloy / UNS N06022 |
| Finish |
Electropolished and passivated |
Electropolished and passivated |
| Seat |
PCTFE (Polyimide optional) |
PCTFE |
All specifications subject to change without notice.
|
CAUTION: Product selection is the sole responsibility of the user, regardless of any recommendations or suggestions made by the factory. The user shall make selections based upon their own analysis
and testing with regard to function, material compatibility and product ratings. Proper installation, operation and maintenance are also required to assure safe, trouble free performance.
PureT has product options and variations which are not documented in data sheets. If you have a model number that is not defined by the ordering information, please consult the factory or your local
representative. *S equivalent to SHP – stainless steel with Ni-Cr-Mo alloy poppet and diaphragm
