| Products Introduction |
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| 产品介绍 |
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SERIES PT1000 |
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SINGLE STAGE FREE POPPET REGULATOR
Low to intermediate flow capacity |
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• Flow rates to 120 slpm (4 scfm) of N2
• Inlet pressure rating 3,500 psig (241 bar)
• SS 316L VAR or single melt construction
• Super alloy internals option
• Standard surface finish 10 Ra μ inch, 5 Ra μ inch optional
• Regulator of choice for point of use applications
• Sub atmospheric option for absolute pressure delivery
• Automated functional testing
• All manufacturing and testing to Pure T UHP semiconductor standards
• Face seal and tube stub connection options
• Installation and operating instructions posted to www.puretuhp.com in the Pure Tech section |
| Operating Parameters |
Other Parameters |
| Source pressure |
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| PT1001 and TF option |
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| vacuum to 3,500 psig (241 bar) |
| vacuum to 300 psig (21 bar) |
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| Delivery pressure |
PT1001 |
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PT1002 |
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PT1006 |
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PT1010 |
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PT1015 |
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PT1030 |
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| 0.5 to 10 psig (0.03 to 0.7 bar) |
| 1 to 30 psig (0.07 to 2 bar |
| 2 to 60 psig (0.14 to 4 bar) |
| 2 to 100 psig (0.14 to 7 bar) |
| 5 to 150 psig (0.34 to 10 bar) |
| 5 to 300 psig (0.34 to 21 bar) |
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| Proof pressure |
150% of operating pressures |
| Burst pressure |
300% of operating pressures |
*PT1415 will not achieve full outlet pressure rating at all inlet pressures. |
| Inlet/outlet connectors |
1/4 or 1/2 inch face seal or tube weld |
| Bonnet port |
1/8 inch NPT |
| Flow coefficient (Cv) |
0.09 (0.15 HF option) |
| Internal volume |
0.49in3 (8 cm3 ) |
| Operating temperature |
30° to +158°F(30° to +70°C)* |
| Surface finish |
15 µin Ra max / 10 µin. Ra avg.
(0.4/0.25 µm) standard;
5 µin (0.13 µm) Ra max optiona
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| Inboard leakage |
1 x 10-9 sccs He |
| Outboard leakage |
2 x 10-9 sccs He |
| Leakage across seat |
sniffer probe |
| Installation |
surface or panel (optional) |
| Supply pressure effect |
0.75 psig per 100 psig source pressure change |
**VS option 14° to 194°F (-10° to + 90°C). |
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Series PT1000 S/SV |
Series PT1000 SVH |
| Wetted Parts |
| Body |
SS 316L/SS 316L secondary remelt |
SS 316L secondary remelt |
| Poppet and diaphragm |
SS 316L |
Ni-Cr-Mo alloy / UNS N06022 |
| Finish |
Electropolished and passivated |
Electropolished and passivated |
| Seat |
PCTFE (Polyimide & PTFE optional) |
PCTFE (PTFE optional) |
All specifications subject to change without notice.
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CAUTION: Product selection is the sole responsibility of the user, regardless of any recommendations or suggestions made by the factory.
The user shall make selections based upon their own analysis
and testing with regard to function, material compatibility and product ratings. Proper installation, operation and maintenance are also required to assure safe, trouble free performance.
Pure T has product options and variations which are not documented in data sheets. If you have a model number that is not defined by the ordering information, please consult the factory or your
local representative.